Coverart for item
The Resource Database needs for modeling and simulation of plasma processing, Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council, (electronic resource)

Database needs for modeling and simulation of plasma processing, Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council, (electronic resource)

Label
Database needs for modeling and simulation of plasma processing
Title
Database needs for modeling and simulation of plasma processing
Statement of responsibility
Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
DLC
LC call number
TK7871.85
LC item number
.D374 1996
http://library.link/vocab/relatedWorkOrContributorName
National Research Council (U.S.)
Series statement
The compass series
http://library.link/vocab/subjectName
  • Semiconductors
  • Plasma engineering
  • Plasma engineering
Label
Database needs for modeling and simulation of plasma processing, Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council, (electronic resource)
Instantiates
Publication
Bibliography note
Includes bibliographical references
Control code
OCM1bookssj0000135098
Dimensions
unknown
Isbn
9780309055918
Lccn
96070732
Specific material designation
remote
System control number
(WaSeSS)bookssj0000135098
Label
Database needs for modeling and simulation of plasma processing, Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council, (electronic resource)
Publication
Bibliography note
Includes bibliographical references
Control code
OCM1bookssj0000135098
Dimensions
unknown
Isbn
9780309055918
Lccn
96070732
Specific material designation
remote
System control number
(WaSeSS)bookssj0000135098

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