The Resource Dopant incorporation efficiency in CVD silicon carbide epilayers, D.J. Larkin, (microform)

Dopant incorporation efficiency in CVD silicon carbide epilayers, D.J. Larkin, (microform)

Label
Dopant incorporation efficiency in CVD silicon carbide epilayers
Title
Dopant incorporation efficiency in CVD silicon carbide epilayers
Statement of responsibility
D.J. Larkin
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
GPO
http://library.link/vocab/creatorName
Larkin, David J
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
United States
Series statement
NASA-TM
Series volume
112756
http://library.link/vocab/subjectName
  • Vapor deposition
  • Silicon carbides
  • Epitaxy
  • Additives
Label
Dopant incorporation efficiency in CVD silicon carbide epilayers, D.J. Larkin, (microform)
Instantiates
Publication
Note
Shipping list no.: 98-0613-M
Carrier category
microfiche
Carrier category code
  • he
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
42996198
Dimensions
4x6 in. or 11x15 cm.
Emulsion on film
diazo
Extent
1 volume
Form of item
microfiche
Generation
first generation master
Media category
microform
Media MARC source
rdamedia
Media type code
  • h
http://library.link/vocab/ext/overdrive/overdriveId
19970019642
Positive negative aspect
negative
http://bibfra.me/vocab/marc/reductionRatio
02
ReductionRatioRange
normal reduction
Reproduction note
Microfiche.
Specific material designation
microfiche
Label
Dopant incorporation efficiency in CVD silicon carbide epilayers, D.J. Larkin, (microform)
Publication
Note
Shipping list no.: 98-0613-M
Carrier category
microfiche
Carrier category code
  • he
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
42996198
Dimensions
4x6 in. or 11x15 cm.
Emulsion on film
diazo
Extent
1 volume
Form of item
microfiche
Generation
first generation master
Media category
microform
Media MARC source
rdamedia
Media type code
  • h
http://library.link/vocab/ext/overdrive/overdriveId
19970019642
Positive negative aspect
negative
http://bibfra.me/vocab/marc/reductionRatio
02
ReductionRatioRange
normal reduction
Reproduction note
Microfiche.
Specific material designation
microfiche

Library Locations

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      38.710138 -90.311107
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