The Resource Electron beam induced damage in PECVD Si3N4 and SiO2 films on InP, Dragan M. Pantie [and four others]

Electron beam induced damage in PECVD Si3N4 and SiO2 films on InP, Dragan M. Pantie [and four others]

Label
Electron beam induced damage in PECVD Si3N4 and SiO2 films on InP
Title
Electron beam induced damage in PECVD Si3N4 and SiO2 films on InP
Statement of responsibility
Dragan M. Pantie [and four others]
Creator
Contributor
Author
Issuing body
Subject
Genre
Language
eng
Member of
Cataloging source
GPO
http://library.link/vocab/creatorName
Pantic, Dragan M
Funding information
Sponsored by the National Aeronautics and Space Administration
Government publication
federal national government publication
Illustrations
illustrations
Index
no index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
  • technical reports
http://library.link/vocab/relatedWorkOrContributorName
Lewis Research Center
Series statement
NASA technical memorandum
Series volume
102544
http://library.link/vocab/subjectName
  • Capacitance-voltage characteristics
  • Electron beams
  • Indium phosphides
  • Irradiation
  • Phosphorus
  • Plasmas (physics)
  • Radiation damage
  • Vapor deposition
Type of report
Technical memorandum.
Label
Electron beam induced damage in PECVD Si3N4 and SiO2 films on InP, Dragan M. Pantie [and four others]
Instantiates
Publication
Note
"Performing organization: National Aeronautics and Space Administration, Lewis Research Center"--Report documentation page
Bibliography note
Includes bibliographical references (page 13)
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
994303469
Extent
1 online resource (15 pages)
Form of item
online
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations.
Specific material designation
remote
Label
Electron beam induced damage in PECVD Si3N4 and SiO2 films on InP, Dragan M. Pantie [and four others]
Publication
Note
"Performing organization: National Aeronautics and Space Administration, Lewis Research Center"--Report documentation page
Bibliography note
Includes bibliographical references (page 13)
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
994303469
Extent
1 online resource (15 pages)
Form of item
online
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other physical details
illustrations.
Specific material designation
remote

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