Coverart for item
The Resource Low energy ion assisted film growth, A.R. González-Elipe, F. Yubero, J.M. Sanz, (electronic resource)

Low energy ion assisted film growth, A.R. González-Elipe, F. Yubero, J.M. Sanz, (electronic resource)

Label
Low energy ion assisted film growth
Title
Low energy ion assisted film growth
Statement of responsibility
A.R. González-Elipe, F. Yubero, J.M. Sanz
Creator
Contributor
Subject
Language
eng
Summary
Annotation:
Cataloging source
CaPaEBR
http://library.link/vocab/creatorName
González-Elipe, A. R
LC call number
QC176.84.R3
LC item number
G65 2003eb
http://library.link/vocab/relatedWorkOrContributorName
  • Yubero, F
  • Sanz, J. M.
  • ebrary, Inc
http://library.link/vocab/subjectName
  • Thin films
  • Thin films
  • Ion bombardment
Summary expansion
This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book
Label
Low energy ion assisted film growth, A.R. González-Elipe, F. Yubero, J.M. Sanz, (electronic resource)
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Control code
OCM1bookssj0000194669
Dimensions
unknown
Isbn
9781860943515
Specific material designation
remote
System control number
(WaSeSS)bookssj0000194669
Label
Low energy ion assisted film growth, A.R. González-Elipe, F. Yubero, J.M. Sanz, (electronic resource)
Publication
Bibliography note
Includes bibliographical references and index
Control code
OCM1bookssj0000194669
Dimensions
unknown
Isbn
9781860943515
Specific material designation
remote
System control number
(WaSeSS)bookssj0000194669

Library Locations

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      38.710138 -90.311107
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