Coverart for item
The Resource Low energy ion assisted film growth, A.R. González-Elipe, F. Yubero, J.M. Sanz

Low energy ion assisted film growth, A.R. González-Elipe, F. Yubero, J.M. Sanz

Label
Low energy ion assisted film growth
Title
Low energy ion assisted film growth
Statement of responsibility
A.R. González-Elipe, F. Yubero, J.M. Sanz
Creator
Contributor
Subject
Language
eng
Summary
This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book
Member of
Cataloging source
N$T
http://library.link/vocab/creatorName
González-Elipe, A. R
Dewey number
621.38152
Illustrations
illustrations
Index
index present
Language note
English
LC call number
QC176.84.R3
LC item number
G65 2003eb
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Yubero, F
  • Sanz, J. M.
http://library.link/vocab/subjectName
  • Thin films
  • Thin films
  • Ion bombardment
  • TECHNOLOGY & ENGINEERING
  • TECHNOLOGY & ENGINEERING
  • Ion bombardment
  • Thin films
  • Thin films
Label
Low energy ion assisted film growth, A.R. González-Elipe, F. Yubero, J.M. Sanz
Instantiates
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
Cover -- Contents -- Foreword -- CHAPTER 1: BASIC CONCEPTS ON THE INTERACTION OF LOW ENERGY ION BEAMS WITH SOLID TARGETS -- 1.1. Introduction -- 1.2. Interatomic interaction -- 1.3. Basic concepts in classical dynamics of binary elastic collisions -- 1.4. Range of energetic ions in solids -- 1.5. Spatial distribution of deposited energy -- 1.6. Damage induced by ion bombardment -- 1.7. Sputtering -- 1.8. Experimental parameters in IAD thin film growth -- References -- CHAPTER 2: ION ASSISTED METHODS OF PREPARATION OF THIN FILMS -- 2.1. Assistance of film growth with independent ion sources -- 2.2. Ion assisted deposition of thin films without independent ion sources -- 2.3. Plasma immersion ion implantation -- 2.4. Broad beam ion sources -- References -- CHAPTER 3: EFFECTS INDUCED BY THE ION ASSISTANCE OF FILM GROWTH -- 3.1. Ion beam effects during film growth -- 3.2. Nucleation and growth of thin films under ion bombardment &
Control code
261114897
Dimensions
unknown
Extent
1 online resource (xiv, 283 pages)
File format
unknown
Form of item
online
Isbn
9781860943515
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other control number
9781860943515
Other physical details
illustrations
Quality assurance targets
not applicable
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote
System control number
(OCoLC)261114897
Label
Low energy ion assisted film growth, A.R. González-Elipe, F. Yubero, J.M. Sanz
Publication
Antecedent source
unknown
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
Cover -- Contents -- Foreword -- CHAPTER 1: BASIC CONCEPTS ON THE INTERACTION OF LOW ENERGY ION BEAMS WITH SOLID TARGETS -- 1.1. Introduction -- 1.2. Interatomic interaction -- 1.3. Basic concepts in classical dynamics of binary elastic collisions -- 1.4. Range of energetic ions in solids -- 1.5. Spatial distribution of deposited energy -- 1.6. Damage induced by ion bombardment -- 1.7. Sputtering -- 1.8. Experimental parameters in IAD thin film growth -- References -- CHAPTER 2: ION ASSISTED METHODS OF PREPARATION OF THIN FILMS -- 2.1. Assistance of film growth with independent ion sources -- 2.2. Ion assisted deposition of thin films without independent ion sources -- 2.3. Plasma immersion ion implantation -- 2.4. Broad beam ion sources -- References -- CHAPTER 3: EFFECTS INDUCED BY THE ION ASSISTANCE OF FILM GROWTH -- 3.1. Ion beam effects during film growth -- 3.2. Nucleation and growth of thin films under ion bombardment &
Control code
261114897
Dimensions
unknown
Extent
1 online resource (xiv, 283 pages)
File format
unknown
Form of item
online
Isbn
9781860943515
Level of compression
unknown
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other control number
9781860943515
Other physical details
illustrations
Quality assurance targets
not applicable
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote
System control number
(OCoLC)261114897

Library Locations

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      38.710138 -90.311107
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