The Resource Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers, D.J. Larkin, (microform)

Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers, D.J. Larkin, (microform)

Label
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
Title
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
Statement of responsibility
D.J. Larkin
Title variation
Site competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
GPO
http://library.link/vocab/creatorName
Larkin, David J
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
United States
Series statement
NASA-TM
Series volume
112474
http://library.link/vocab/subjectName
  • Silicon
  • Vapor deposition
  • Epitaxy
  • Additives
  • Nitrogen
Label
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers, D.J. Larkin, (microform)
Instantiates
Publication
Note
Shipping list no.: 99-0055-M
Carrier category
microfiche
Carrier category code
  • he
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
42818058
Dimensions
4x6 in. or 11x15 cm.
Emulsion on film
diazo
Extent
1 volume
Form of item
microfiche
Generation
first generation master
Media category
microform
Media MARC source
rdamedia
Media type code
  • h
http://library.link/vocab/ext/overdrive/overdriveId
19970020728
Positive negative aspect
negative
http://bibfra.me/vocab/marc/reductionRatio
02
ReductionRatioRange
normal reduction
Reproduction note
Microfiche.
Specific material designation
microfiche
Label
Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers, D.J. Larkin, (microform)
Publication
Note
Shipping list no.: 99-0055-M
Carrier category
microfiche
Carrier category code
  • he
Carrier MARC source
rdacarrier
Color
black and white
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
42818058
Dimensions
4x6 in. or 11x15 cm.
Emulsion on film
diazo
Extent
1 volume
Form of item
microfiche
Generation
first generation master
Media category
microform
Media MARC source
rdamedia
Media type code
  • h
http://library.link/vocab/ext/overdrive/overdriveId
19970020728
Positive negative aspect
negative
http://bibfra.me/vocab/marc/reductionRatio
02
ReductionRatioRange
normal reduction
Reproduction note
Microfiche.
Specific material designation
microfiche

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      38.710138 -90.311107
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